Company Filing History:
Years Active: 2013-2016
Title: Otto Lach: Innovator in Wafer Processing Technology
Introduction
Otto Lach is a notable inventor based in Treffen, Austria, recognized for his contributions to the field of wafer processing technology. With a total of 7 patents to his name, Lach has made significant advancements that enhance the efficiency and effectiveness of wafer processing.
Latest Patents
Among his latest innovations is a device and method for processing wafer-shaped articles. This device features a spin chuck designed to hold and rotate a wafer-shaped article around a rotation axis. It includes at least one dispenser for applying liquid onto the surface of the wafer. A liquid collector surrounds the spin chuck, effectively collecting liquid that is spun off during rotation. This collector is equipped with at least two levels for separately gathering liquids. Additionally, the device incorporates a lifting mechanism that allows the spin chuck to move relative to the liquid collector. It also has multiple exhaust levels for collecting gas from within the liquid collector, each equipped with openings that can be independently opened or closed. Another notable patent is the grounded chuck, which improves the reduction of static charge in spin chucks through the use of pin assemblies made from chemically inert materials with electrically conductive inlays.
Career Highlights
Otto Lach is currently associated with Lam Research AG, a company renowned for its innovative solutions in semiconductor manufacturing. His work at Lam Research AG has positioned him as a key player in the development of advanced wafer processing technologies.
Collaborations
Throughout his career, Lach has collaborated with esteemed colleagues, including Michael Brugger and Dietmar Hammer. These partnerships have fostered an environment of innovation and have contributed to the successful development of his patented technologies.
Conclusion
Otto Lach's contributions to wafer processing technology exemplify his commitment to innovation and excellence in the field. His patents reflect a deep understanding of the complexities involved in semiconductor manufacturing, making him a significant figure in this industry.