Meng-Chang Liu

Title: Innovator Meng-Chang Liu: Pioneering Advances in Semiconductor Processing

Introduction

Meng-Chang Liu, a prominent inventor based in Chia-Yi, Taiwan, has made significant contributions to the field of semiconductor processing. With a portfolio of ten patents, his work primarily focuses on enhancing the efficiency and effectiveness of manufacturing processes in the semiconductor industry.

Latest Patents

Among Liu's latest patents, two stand out for their innovative approaches:

1. **Method of High Selectivity Wet Etching of Salicides** - This method involves forming salicides with lower sheet resistance and increased uniformity over semiconductor process wafers. The process includes the deposition of a metal layer with cobalt or titanium, followed by thermal annealing to form metal silicides. Liu developed a wet etching solution comprising phosphoric acid, nitric acid, and carboxylic acid, which selectively etches unsilicided areas while retaining salicides over the silicon-containing areas.

2. **Method for Forming a Top Interconnection Level and Bonding Pads on an Integrated Circuit Chip** - This innovative technique describes the fabrication of a top interconnection level and bonding pads using a damascene process. The bonding pads are strategically placed above the interconnection channels to prevent dishing during polishing. This approach not only enhances the integrity of the bonding pads but also allows for the use of various conductive materials, including aluminum, tungsten, and copper.

Career Highlights

Meng-Chang Liu's career includes significant tenures at notable companies in the semiconductor industry, including Taiwan Semiconductor Manufacturing Company and Vanguard International Semiconductor Corporation. His experience at these leading firms has fueled his innovative spirit and equipped him with the knowledge necessary to develop groundbreaking solutions in semiconductor technology.

Collaborations

Throughout his career, Liu has collaborated with talented professionals in the field, including Yuan-Lung Liu and Shea-Jue Wang. These collaborative efforts have resulted in the development of advanced technologies that push the boundaries of modern semiconductor manufacturing processes.

Conclusion

In summary, Meng-Chang Liu stands out as a pivotal figure in the semiconductor industry, with significant achievements reflected in his ten patents. His innovative methods for etching and interconnection fabrication have contributed greatly to the efficiency of semiconductor chips, setting a high standard for future developments in the field.