Masato Horiguchi, an accomplished inventor based in Miyagi, Japan, has made significant contributions to the field of substrate processing technology. With a total of nine patents to his name, Horiguchi has been at the forefront of innovations that enhance manufacturing processes in the semiconductor industry.

Latest Patents

Among his latest patents, Horiguchi has developed a "Pin Control Method" and a "Substrate Processing Apparatus." The substrate processing apparatus features a processing container and a placement table equipped with multiple pins designed to facilitate substrate delivery. The invention includes several drivers to vertically move the pins, as well as measuring devices with encoders to accurately gauge the height positions of each pin. A sophisticated controller is integral to the system, allowing for measurement of pin heights, selection of a reference pin, and adjustment of driving speeds to ensure all pins conform to the desired reference height.

The associated pin control method enhances this technology further by measuring the height positions of the pins, selecting a reference pin for speed regulation, estimating its future height position, and adjusting the driving speeds of other pins for consistent performance. This system showcases Horiguchi's ingenuity and his commitment to improving precision in substrate processing.

Career Highlights

Masato Horiguchi is currently employed at Tokyo Electron Limited, a leading provider in the semiconductor manufacturing equipment industry. Throughout his career, he has focused on creating innovative solutions that streamline production processes and improve efficiency in operations.

Collaborations

In his role at Tokyo Electron Limited, Horiguchi has collaborated with esteemed colleagues such as Hiroshi Tsujimoto and Koji Maruyama. Their combined efforts have fostered a collaborative environment that encourages creativity and the development of novel technologies.

Conclusion

Masato Horiguchi's contributions to the field of substrate processing through his innovative patents are a testament to his expertise and dedication as an inventor. His work continues to impact the semiconductor industry, highlighting the importance of advancements in technology and their capacity to drive efficiency and effectiveness in manufacturing processes.

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