Location History:
- Mashiki-Machi, JP (2002)
- Kamimashiki-gun, JP (2002 - 2003)
- Kumamoto-ken, JP (2002 - 2004)
- Kikuyo-Machi, JP (2003 - 2005)
- Kumamoto, JP (2003 - 2005)
- Kikuchi-gun, JP (2003 - 2006)
Company Filing History:
Years Active: 2002-2006
Title: Masateru Morikawa: Innovator in Coating Film Technology
Introduction
Masateru Morikawa is a prominent inventor based in Kikuchi-gun, Japan. He has made significant contributions to the field of coating film technology, holding a total of 17 patents. His work focuses on developing advanced apparatuses for applying coating solutions to substrates, which are essential in various manufacturing processes.
Latest Patents
One of Morikawa's latest inventions is a coating film forming apparatus designed to apply a coating solution to a substrate efficiently. This apparatus includes a cassette section, a coating unit, a developing unit, pre-treatment and post-treatment units, and a main arm for transferring the substrate between these units. The coating section allows for the application of a resist on the substrate using a single stroke method, which involves intermittently moving the substrate in a Y-direction while the nozzle moves in an X-direction. Additionally, the apparatus features a reduced-pressure drying section that dries the substrate under reduced pressure after the coating is applied. It also includes equipment for removing any coating film that adheres to the periphery of the substrate. Notably, when the reduced-pressure drying section is positioned outside the coating unit, the main arm is covered with a protective cover to maintain a solvent atmosphere inside.
Career Highlights
Masateru Morikawa is currently employed at Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His innovative work has positioned him as a key figure in the development of advanced coating technologies.
Collaborations
Throughout his career, Morikawa has collaborated with notable colleagues, including Takahiro Kitano and Yukihiko Esaki. These partnerships have contributed to the advancement of technology in the coating film sector.
Conclusion
Masateru Morikawa's contributions to coating film technology through his numerous patents and collaborations highlight his importance in the field. His innovative approaches continue to influence manufacturing processes and enhance the efficiency of coating applications.