The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 01, 2005
Filed:
Mar. 21, 2002
Shinji Kobayashi, Kumamoto, JP;
Takahiro Kitano, Kumamoto, JP;
Masateru Morikawa, Kumamoto, JP;
Kazuhiro Takeshita, Kumamoto, JP;
Yoshiyuki Kawafuchi, Kumamoto, JP;
Shinji Kobayashi, Kumamoto, JP;
Takahiro Kitano, Kumamoto, JP;
Masateru Morikawa, Kumamoto, JP;
Kazuhiro Takeshita, Kumamoto, JP;
Yoshiyuki Kawafuchi, Kumamoto, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
The present invention is a coating unit for applying a coating solution to a substrate which includes: a discharge nozzle for reciprocating in a predetermined direction above the substrate and discharging the coating solution to the substrate; a holder for holding the substrate and horizontally movable in one direction perpendicular to the predetermined direction; and a cover for covering an upper face of the substrate when the substrate is moved in the one direction to be more forward than the discharge nozzle as viewed from a plane, wherein a lower face of the cover is inclined such as to be higher on the discharge nozzle side. According to the present invention, the cover covering the upper face of the substrate restrains a solvent from evaporating from the coating solution applied on the substrate to secure flatness of a coating film.