The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 23, 2005
Filed:
Feb. 11, 2003
Takahiro Kitano, Kikuchi-gun, JP;
Shinji Kobayashi, Kikuchi-gun, JP;
Yukihiko Esaki, Kikuchi-gun, JP;
Masateru Morikawa, Kikuchi-gun, JP;
Takahiro Kitano, Kikuchi-gun, JP;
Shinji Kobayashi, Kikuchi-gun, JP;
Yukihiko Esaki, Kikuchi-gun, JP;
Masateru Morikawa, Kikuchi-gun, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A method of forming a film of a coating solution on a substrate includes steps of moving a coating solution discharge member relative to a substrate while a coating solution is being discharged from the coating solution discharge member to the surface of the substrate, and changing a discharge direction of the coating solution to an outer peripheral portion of the substrate to make the amount of application to the outer peripheral portion smaller than that to other portions. This can reduce the amount of application to the outer peripheral portion of the substrate, thereby making it possible to restrain protuberance of the coating solution at the outer peripheral portion of the substrate caused by surface tension. Consequently, a coating film which is uniform also at the outer peripheral portion on the substrate is formed.