Location History:
- Kumamoto, JP (2003)
- Kumamoto-ken, JP (2002 - 2004)
- Kikuyo-Machi, JP (2003 - 2005)
- Kikuchi-gun, JP (2003 - 2006)
Company Filing History:
Years Active: 2002-2006
Title: Yukihiko Esaki: Innovator in Coating Film Technology
Introduction
Yukihiko Esaki is a prominent inventor based in Kikuchi-gun, Japan. He has made significant contributions to the field of coating film technology, holding a total of 13 patents. His innovative work has been instrumental in advancing the efficiency and effectiveness of coating processes.
Latest Patents
One of Esaki's latest patents is a coating film forming apparatus and coating unit. This apparatus is designed for forming a film by applying a coating solution to a substrate. It features a cassette section, coating unit, developing unit, pre-treatment/post-treatment units, and a main arm for transferring the substrate between these units. The coating section allows for the application of a resist on the substrate through a single stroke, achieved by intermittently moving the substrate in a Y-direction while the nozzle moves in an X-direction. Additionally, it includes a reduced-pressure drying section for drying the substrate after application, along with equipment for removing any coating film adhered to the periphery of the substrate. Notably, when the reduced-pressure drying section is positioned outside the coating unit, the main arm is covered to maintain a solvent atmosphere inside.
Career Highlights
Yukihiko Esaki is currently associated with Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His work at the company has allowed him to focus on developing advanced technologies that enhance production processes.
Collaborations
Esaki has collaborated with notable coworkers, including Takahiro Kitano and Masateru Morikawa. Their combined expertise has contributed to the successful development of innovative solutions in the field of coating technology.
Conclusion
Yukihiko Esaki's contributions to coating film technology through his patents and collaborations highlight his role as a key innovator in the industry. His work continues to influence advancements in manufacturing processes, showcasing the importance of innovation in technology.