The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 13, 2004
Filed:
Dec. 13, 2000
Takahiro Kitano, Kikuchi-gun, JP;
Masateru Morikawa, Kikuchi-gun, JP;
Yukihiko Esaki, Kikuchi-gun, JP;
Nobukazu Ishizaka, Kikuchi-gun, JP;
Norihisa Koga, Kikuchi-gun, JP;
Kazuhiro Takeshita, Kikuchi-gun, JP;
Hirofumi Ookuma, Kikuchi-gun, JP;
Masami Akimoto, Kikuchi-gun, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A coating film forming apparatus for forming a film by applying a coating solution to a substrate, which is provided with a cassette section, coating unit, developing unit, pre-treatment/post-treatment units and a main arm for transferring the substrate between the respective units. In the coating unit, provided is a coating section in which a resist is applied on the substrate in a manner of single stroke by intermittently moving the substrate in a Y-direction and by moving a nozzle in an X-direction, and provided is a reduced-pressure drying section for drying under reduced pressure the substrate after being applied, and further provided is equipment for removing the coating film adhered to a periphery of the substrate. Additionally, when the reduced-pressure drying section is arranged outside the coating unit, the main arm is covered with a cover so that the inside thereof is under a solvent atmosphere.