Masaki Nagai

Title: Masaki Nagai: Innovator in Mask Technology

Introduction

Masaki Nagai is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of mask technology, holding a total of six patents. His innovative work has advanced the manufacturing processes and materials used in the production of mask blanks and transfer masks.

Latest Patents

Nagai's latest patents include a mask blank and a method for manufacturing a mask blank and transfer mask. The mask blank features a substrate with a thin film for forming a transfer pattern. It also includes a resist underlayer made from a composition containing a polymer with a lactone ring and a hydroxyl group. Additionally, a resist film is formed on the resist underlayer, made from a resist composition. Another notable patent describes a mask blank that consists of a thin film, a resist underlying film, and a resist film made of a chemically amplified resist. This design allows for a reduction in molecular weight from the thin film side to the resist film side, enhancing the efficiency of the mask's performance.

Career Highlights

Throughout his career, Masaki Nagai has worked with notable companies such as Nissan Chemical Industries Limited and Hoya Corporation. His experience in these organizations has contributed to his expertise in the field of mask technology and innovation.

Collaborations

Nagai has collaborated with several talented individuals, including Rikimaru Sakamoto and Masahiro Hashimoto. These partnerships have fostered a creative environment that has led to the development of groundbreaking technologies.

Conclusion

Masaki Nagai's contributions to mask technology through his patents and collaborations highlight his role as an influential inventor in the industry. His work continues to impact the field, paving the way for future innovations.