Masahiro Seyama

Title: Masahiro Seyama: Innovator in Exposure Technology

Introduction

Masahiro Seyama is a prominent inventor based in Gunma, Japan, known for his significant contributions to exposure technology. With a total of seven patents to his name, Seyama has made remarkable advancements in the field, particularly in the development of exposure apparatuses and methods.

Latest Patents

Seyama's latest patents focus on innovative exposure apparatuses designed to form complex and fine patterns. One of his notable inventions combines optical exposure technology with charged particle beam exposure technology. This apparatus radiates a charged particle beam at specific positions corresponding to a line pattern on a sample. It includes a beam generating section that produces multiple charged particle beams at different irradiation positions, a scanning control section for scanning these beams along the line pattern, a selecting section to choose the appropriate beam for irradiation, and an irradiation control section to manage the selected beam's exposure to the sample. Another patent involves an exposure apparatus that utilizes a plurality of blanking electrodes, which control whether the corresponding particle beam irradiates the sample based on input voltage. This apparatus also features an irradiation control section that outputs switching signals for the blanking electrodes and a measuring section that tracks the delay from when the switching signal changes to when the blanking voltage is adjusted.

Career Highlights

Throughout his career, Seyama has worked with notable companies, including Advantest Corporation and Intel Corporation. His experience in these organizations has contributed to his expertise in exposure technology and innovation.

Collaborations

Seyama has collaborated with talented individuals in the field, including Akio Yamada and Masaki Kurokawa. These partnerships have likely enhanced his work and led to further advancements in exposure technology.

Conclusion

Masahiro Seyama's contributions to exposure technology through his patents and collaborations highlight his role as an influential inventor in the industry. His innovative approaches continue to shape the future of exposure methods and apparatuses.