The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 19, 2000
Filed:
May. 21, 1998
Masahiro Seyama, Meiwa-mura, JP;
Advantest Corp, Tokyo, JP;
Abstract
A charged particle beam test system has improved voltage measurement accuracy when irradiating a charged particle beam upon predetermined portion of a device under test (DUT) and detecting secondary electron detected therefrom representing a voltage of the irradiated portion of the DUT. The test system includes a DUT driver for supplying a test signal to the DUT to cause the voltage at the irradiated portion and generating a trigger signal, a sampling pulse generator for continuously generating a sampling pulse having a predetermined time interval to drive the charged particle beam, a time difference detector for detecting a time difference between the trigger signal and the sampling pulse, an address data generator for generating address data corresponding to the time difference, and a test result memory for storing measured data representing an amount of the secondary electron emitted from the irradiation portion of the DUT in addresses specified by the address.