The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 28, 2007
Filed:
Jun. 23, 2005
Masahiro Seyama, Tokyo, JP;
Masayuki Kuribara, Tokyo, JP;
Toshihiko Hara, Tokyo, JP;
Kazuhiro Arakawa, Tokyo, JP;
Toshimichi Iwai, Tokyo, JP;
Masahiro Seyama, Tokyo, JP;
Masayuki Kuribara, Tokyo, JP;
Toshihiko Hara, Tokyo, JP;
Kazuhiro Arakawa, Tokyo, JP;
Toshimichi Iwai, Tokyo, JP;
Advantest Corporation, Tokyo, JP;
Abstract
There is provided a sample observing apparatus for observing the surface of a sample by irradiating an electron beam thereto, having an electron gun for irradiating the electron beam to the surface of the sample, a potential control section for adjusting electric potential of the surface of the sample to potential set in advance by applying voltage determined based on an amount of electric charge on the surface of the sample to the sample, an electron detecting section for detecting electrons produced when the electron beam is irradiated to the surface of the sample and an appearance acquiring section for acquiring the appearance of surface of the sample per each spot on the surface based on the electrons detected by the electron detecting section.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile