Markus Koch

Title: Innovations by Inventor Markus Koch in Optical Technology

Introduction

Markus Koch, an accomplished inventor based in Neu-Ulm, Germany, has made significant contributions to the field of optical technology. With a total of seven patents to his name, he specializes in the development of advanced methods and systems for reproducing wavefronts essential in various imaging optical applications.

Latest Patents

Koch's latest patents include a "Method for reproducing a target wavefront of an imaging optical production system" and a "Metrology system for carrying out the method." This innovative optical measuring system utilizes an object holder and multiple optical components that can be adjusted by actuator means to reproduce a target wavefront accurately. The process begins with the specification of a starting actuator position set, followed by a series of coarse and fine measurements that minimize wavefront deviations. Such technology promises to enhance the precision of optical measuring systems used in production settings.

Another noteworthy patent is the "Method and device for characterizing a mask for microlithography." This method employs an optical system where an illumination optical unit and an imaging optical unit collaborate to characterize masks used in microlithography. The process includes capturing and evaluating image data that detail the mask's thermal state, thereby allowing modifications to enhance characterization.

Career Highlights

Markus Koch is associated with Carl Zeiss SMT GmbH, a prestigious company known for its innovations in optical systems and equipment. His work has significantly impacted microlithography and optical metrology, making strides in optical production systems that influence various industries, including semiconductor manufacturing.

Collaborations

Koch collaborates with talented professionals, including Dirk Hellweg and Renzo Capelli, who share a passion for advancing optical technology. Together, they contribute to innovative projects that push the boundaries of optical engineering, ensuring more efficient and effective methodologies in their field.

Conclusion

Markus Koch's inventive spirit and expertise have placed him at the forefront of optical technology innovation. His work not only exemplifies technical proficiency but also contributes to the advancement of methodologies and devices that shape the future of imaging optical systems. Through his patents and collaborations, he continues to refine and redefine optical measurement techniques, solidifying his reputation as a leading inventor in the field.