Location History:
- Hayward, CA (US) (2004 - 2006)
- Tigard, OR (US) (2008 - 2017)
Company Filing History:
Years Active: 2004-2017
Title: Mark L Rea: Innovator in Semiconductor Processing
Introduction
Mark L Rea is a notable inventor based in Tigard, OR (US). He has made significant contributions to the field of semiconductor processing, holding a total of 8 patents. His work primarily focuses on methods and apparatus for enhancing wafer processing techniques.
Latest Patents
One of Mark L Rea's latest patents is a pretreatment method for photoresist wafer processing. This invention relates to processing a partially fabricated semiconductor substrate in a remote plasma environment. The methods may be performed in the context of wafer level packaging (WLP) processes. The techniques include exposing the substrate to a reducing plasma to remove photoresist scum and/or oxidation from an underlying seed layer. In some instances, photoresist scum is eliminated through a series of plasma treatments that involve exposure to an oxygen-containing plasma followed by exposure to a reducing plasma. Additionally, an oxygen-containing plasma is utilized to strip photoresist from a substrate surface after electroplating, which may be followed by a plasma treatment involving exposure to a reducing plasma. The plasma treatments may involve exposure to a remote plasma within a plasma treatment module of a multi-tool electroplating apparatus.
Career Highlights
Throughout his career, Mark L Rea has worked with prominent companies in the semiconductor industry, including Novellus Systems Incorporated and Lam Research Corporation. His experience in these organizations has allowed him to develop innovative solutions that address complex challenges in semiconductor manufacturing.
Collaborations
Mark has collaborated with several professionals in his field, including Steven T Mayer and Henner Meinhold. These collaborations have contributed to the advancement of technologies in semiconductor processing.
Conclusion
Mark L Rea's contributions to semiconductor processing through his patents and collaborations highlight his role as an influential inventor in the industry. His innovative methods continue to shape the future of wafer processing technologies.