The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 11, 2008
Filed:
Dec. 17, 2003
Steven T. Mayer, Lake Oswego, OR (US);
Jonathan D. Reid, Sherwood, OR (US);
Mark L. Rea, Tigard, OR (US);
Ismail T. Emesh, Gilbert, AZ (US);
Henner W. Meinhold, Fremont, CA (US);
John S. Drewery, Alameda, CA (US);
Steven T. Mayer, Lake Oswego, OR (US);
Jonathan D. Reid, Sherwood, OR (US);
Mark L. Rea, Tigard, OR (US);
Ismail T. Emesh, Gilbert, AZ (US);
Henner W. Meinhold, Fremont, CA (US);
John S. Drewery, Alameda, CA (US);
Novellus Systems, Inc., San Jose, CA (US);
Abstract
A disclosed form of mechanically assisted electroplating leads to a flat, thin, overburden. In one example, an accelerator is deposited on a copper surface and mechanically removed in a simplified CMP-like apparatus. The wafer is then plated in an electrolyte containing little or no accelerating additives.