The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 20, 2004

Filed:

Mar. 01, 2002
Applicant:
Inventors:

Henner W. Meinhold, Fremont, CA (US);

Mark L. Rea, Hayward, CA (US);

Sachin M. Chinchwadkar, Milpitas, CA (US);

Fred J. Chetcuti, Milbrae, CA (US);

John S. Drewery, Alameda, CA (US);

Assignee:

Novellus Systems, Inc., San Jose, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B41J 2/125 ;
U.S. Cl.
CPC ...
B41J 2/125 ;
Abstract

In one embodiment, a sensor includes two plates that form a capacitor. A droplet passing between the plates changes the capacitance of the sensor, thereby triggering an amplifier coupled to the sensor to generate an output signal. The output signal is indicative of droplet characteristics and may be used to calibrate a mechanism that dispensed the droplet.


Find Patent Forward Citations

Loading…