Marcus Schumacher

Title: **Innovator Profile: Marcus Schumacher**

Introduction

Marcus Schumacher is a notable inventor based in Kerpen, Germany. He has made significant contributions to the field of semiconductor technology with a total of four patents to his name. His innovative approaches have paved the way for advancements in chemical vapor deposition techniques, catering to the needs of modern manufacturing.

Latest Patents

Among his latest innovations include an **Apparatus and method for high-throughput chemical vapor deposition.** This device is designed for depositing thin layers onto substrates, featuring a process chamber enclosed within a reactor housing. It utilizes a movable susceptor to carry the substrate, with multiple gas feed lines that deliver layer-forming components in various process steps. In order to enhance throughput, the design includes separate deposition chambers that allow for the introduction of different gas compositions, enabling sequential layer deposition.

Another significant patent is the **Process for depositing layers containing silicon and germanium.** This process involves depositing semiconductor layers composed of multiple components through a non-continuous injection method. By adjusting various mass flow rate parameters, such as injection pressure and frequency, Schumacher's method effectively manages the delivery of silicon and germanium starting materials to achieve precise layer formation.

Career Highlights

Throughout his career, Marcus Schumacher has worked with prominent companies in the semiconductor industry, including Aixtron AG and Aixtron, Inc. His experience within these organizations has equipped him with the knowledge and skills necessary to push the boundaries of semiconductor fabrication technologies.

Collaborations

Schumacher has collaborated with notable colleagues in his field, including Peter Baumann and Johannes Lindner. These partnerships have not only bolstered his research endeavors but have also facilitated the sharing of innovative ideas that have contributed to the development of new technologies.

Conclusion

Marcus Schumacher stands out as a pioneering inventor in the semiconductor sector, with his patents reflecting his commitment to advancing chemical vapor deposition techniques. His achievements not only highlight his technical expertise but also showcase his collaborative spirit in driving innovation forward.