Koshi, Japan

Makio Higashi

This inventor holds 6 USPTO granted patents. Top assignee: Tokyo Electron Limited. Active years: 2006-2010.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Makio Higashi. Retrieved from https://idiyas.com/inventor/makio-higashi

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile


% Patents Active = 50.0

Average Co-Inventor Count = 2.3

ph-index = 3

Forward Citations = 495(Granted Patents)


Location History:

  • Tokyo, JP (2007)
  • Kumamoto, JP (2006 - 2008)
  • Koshi, JP (2008 - 2010)

Company Filing History:


Years Active: 2006-2010

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6 patents (USPTO):Explore Patents

Title: The Innovative Contributions of Makio Higashi

Introduction

Makio Higashi is a remarkable inventor based in Koshi, Japan, with a noteworthy portfolio consisting of six patents. His inventions primarily focus on advancements in substrate processing technologies, demonstrating a commitment to improving efficiency and functionality within this field.

Latest Patents

Higashi's latest patents include a **Substrate Collection Method and Substrate Treatment Apparatus**. This invention addresses the challenge of disruptions in substrate treatment processes. When trouble occurs in the substrate treatment apparatus, his method allows for the swift collection of substrates without adversely affecting subsequent treatments, enabling a quick resumption of operations. The apparatus collects all substrates within the coating and developing treatment apparatus using a specialized transfer unit during such disturbances. Additionally, substrates still undergoing processing are collected after completing their treatment.

Another significant innovation by Higashi is the **Substrate Processing Apparatus and Substrate Processing Method**. This invention features a system comprising a transfer schedule creating section, a transfer schedule storage section, and a transfer control section. These components work together to manage multiple transfer mechanisms, optimizing substrate transport according to a predetermined cycle of operations. The standby position control section further enhances efficiency by ensuring that transfer mechanisms are ready for subsequent operations in a seamless manner.

Career Highlights

Makio Higashi is currently associated with Tokyo Electron Limited, a prominent corporation known for its cutting-edge technology in the semiconductor manufacturing sector. His contributions within the company have significantly advanced its capabilities in substrate processing equipment.

Collaborations

Throughout his tenure at Tokyo Electron Limited, Higashi has worked alongside distinguished colleagues, including Akira Miyata and Shigeki Wada. Their collaborative efforts have further propelled innovations and advancements in their respective areas of expertise, contributing to the overall success of the company.

Conclusion

Makio Higashi's exceptional work in substrate processing technologies has led to six patents that stand testament to his inventive spirit and dedication to progress. His latest inventions not only enhance operational efficiency in substrate treatment but also showcase the potential for continual improvement in manufacturing processes. As innovations like those developed by Higashi continue to evolve, they pave the way for a more efficient future in semiconductor fabrication.

Profile summary based on public USPTO records.
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
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