Lucius Marshall Sherwin

Title: Lucius Marshall Sherwin: Innovator in DMD Technology

Introduction

Lucius Marshall Sherwin is a notable inventor based in Plano, TX (US). He has made significant contributions to the field of technology, particularly in the development of methods related to digital micromirror devices (DMD). With a total of 7 patents to his name, Sherwin's work has had a considerable impact on the industry.

Latest Patents

One of Sherwin's latest patents is titled "Mirror via conductivity for DMD pixel." This innovative method involves several intricate steps, including the formation of a first aluminum silicon layer on a metal layer and the creation of a titanium nitride layer on the surface of the aluminum-silicon layer. The process further includes etching the titanium nitride layer to create a pad and forming a torsion hinge in the metal layer. The method also incorporates depositing a sacrificial layer over the torsion hinge and titanium nitride pad, forming a via in the sacrificial layer, and depositing a metal mirror layer. Finally, the sacrificial layer is removed, revealing the completed structure.

Career Highlights

Sherwin has built a successful career at Texas Instruments Corporation, where he has been able to apply his innovative ideas and technical expertise. His work has contributed to advancements in DMD technology, enhancing the performance and capabilities of various electronic devices.

Collaborations

Throughout his career, Sherwin has collaborated with talented individuals such as Noppawan Boorananut and Ronald Charles Roth. These collaborations have fostered a creative environment that has led to the development of groundbreaking technologies.

Conclusion

Lucius Marshall Sherwin is a distinguished inventor whose contributions to DMD technology have made a lasting impact. His innovative methods and collaborative spirit continue to inspire advancements in the field.