The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 19, 2012
Filed:
Nov. 26, 2008
Rosemary Urmese Anthraper, Richardson, TX (US);
Lucius M. Sherwin, Plano, TX (US);
Irma Izzeth Annillo, Rowlett, TX (US);
Rosemary Urmese Anthraper, Richardson, TX (US);
Lucius M. Sherwin, Plano, TX (US);
Irma Izzeth Annillo, Rowlett, TX (US);
Texas Instruments Incorporated, Dallas, TX (US);
Abstract
A method of forming an electronic device includes providing a patterned lower metal layer over a substrate and a first sacrificial layer there between. A second sacrificial layer is formed over the metal layer, and a portion thereof is removed. A third sacrificial layer is formed over the second sacrificial layer, and an upper metal layer is formed over the third sacrificial layer. A portion of the upper metal layer is removed, and the first, second and third sacrificial layers are removed.