Milpitas, CA, United States of America

Liang-Guo Wang


Average Co-Inventor Count = 4.8

ph-index = 7

Forward Citations = 243(Granted Patents)


Location History:

  • Milpitas, CA (US) (1999 - 2004)
  • Fremont, CA (US) (2003 - 2007)

Company Filing History:


Years Active: 1999-2007

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10 patents (USPTO):Explore Patents

Title: Innovations of Liang-Guo Wang

Introduction

Liang-Guo Wang is a notable inventor based in Milpitas, CA, with a significant contribution to the field of substrate analysis and thin film technology. He holds a total of 10 patents, showcasing his innovative approach to solving complex problems in material science.

Latest Patents

One of his latest patents is titled "Patterned substrate surface mapping." This method involves measuring a characteristic of a substrate by directing an incident beam at an inspection grid of points on the substrate. The reflected beam is received with a position-sensitive detector, and the displacement of the reflected beam from its expected location is measured. A database of these displacement measurements is compiled, and the database is examined for effects of a pattern-induced anomaly. This process allows for the correction of pattern-induced errors in displacement measurements, thus overcoming issues with interpreting reflection angles in substrate stress analysis equipment.

Another significant patent is related to "Methods and systems for preparing a sample for thin film analysis." This system includes an energy beam source that generates an energy beam, which is directed to a sample. The energy beam is modified to have a substantially flat-top profile, allowing it to remove a portion of a contaminant layer on the sample and expose an analysis area of a thin film. This innovative method enhances the accuracy of thin film analysis.

Career Highlights

Liang-Guo Wang has worked with prominent companies in the technology sector, including Applied Materials, Inc. and KLA-Tencor Technologies Corporation. His experience in these organizations has contributed to his expertise in developing advanced technologies for substrate and thin film analysis.

Collaborations

Throughout his career, Liang-Guo has collaborated with talented individuals such as Shamouil Shamouilian and Kwok Manus Wong. These collaborations have likely fostered an environment of innovation and creativity, leading to the development of groundbreaking technologies.

Conclusion

Liang-Guo Wang's contributions to the field of substrate analysis and thin film technology are significant and impactful. His innovative patents and career achievements reflect his dedication to advancing material science.

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