The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 19, 2002
Filed:
Feb. 24, 2000
Applicant:
Inventors:
Kadthala R. Narendrnath, San Jose, CA (US);
Liang-Guo Wang, Milpitas, CA (US);
Shamouil Shamouilian, San Jose, CA (US);
Paul E. Luscher, Sunnyvale, CA (US);
Hamid Noorbakhsh, Fremont, CA (US);
Assignee:
Applied Materials Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01K 1/14 ; G01K 1/16 ; G01K 1/120 ; G02B 6/122 ; G02B 6/36 ; H01J 6/304 ;
U.S. Cl.
CPC ...
G01K 1/14 ; G01K 1/16 ; G01K 1/120 ; G02B 6/122 ; G02B 6/36 ; H01J 6/304 ;
Abstract
Apparatus for measuring wafer support assembly temperature in a semiconductor wafer processing system. The apparatus is a modular plug that is mounted to the support assembly. The plug contains a photoluminescent material that exhibits a decay in luminescence after an excitement which is indicative of the temperature of the support assembly.