Company Filing History:
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Years Active: 2008-2017
Title: Lei Zhong: Innovator in Inspection Systems and Analysis Technologies
Introduction
Lei Zhong is a prominent inventor based in Parker, Texas, known for her significant contributions to the field of inspection systems and analysis technologies. With a total of five patents to her name, she has made remarkable advancements that enhance the efficiency and accuracy of various processes in the semiconductor industry.
Latest Patents
Among her latest patents is a method for detecting voids in interconnects, which features an inspection system that utilizes charged particle optics. This system irradiates the bottom of a hole with a charged particle beam along an optical axis. It includes an energy dispersive x-ray detector that captures x-ray photons emitted from the bottom of the hole, generating detection signals indicative of these photons. The processor then processes these signals to estimate the condition of the bottom of the hole. Another notable patent is the aerial mask inspection based weak point analysis system. This system comprises a processor and a memory module that stores aerial images of a mask area, each corresponding to different focus values. The processor analyzes these images to identify weak points and determines focus and exposure values for generating a Process Window Qualification (PWQ) wafer.
Career Highlights
Lei Zhong has worked with notable companies in the industry, including KLA-Tencor Technologies Corporation and Applied Materials Israel Limited. Her experience in these organizations has allowed her to develop and refine her innovative technologies, contributing to the advancement of inspection systems.
Collaborations
Throughout her career, Lei has collaborated with esteemed colleagues, including John McCormack and John Fretwell. These partnerships have fostered an environment of innovation and creativity, leading to the development of cutting-edge technologies.
Conclusion
In summary, Lei Zhong is a trailblazer in the field of inspection systems and analysis technologies. Her patents and career achievements reflect her dedication to innovation and excellence in her work.