The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 31, 2017
Filed:
Sep. 20, 2016
Applicant:
Applied Materials Israel Ltd., Rehovot, IL;
Inventors:
Dror Shemesh, Hod Hasharon, IL;
Lei Zhong, Parker, TX (US);
Assignee:
APPLIED MATERIALS ISRAEL LTD., Rehovot, IL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 23/22 (2006.01); H01J 37/244 (2006.01); G01N 23/225 (2006.01);
U.S. Cl.
CPC ...
H01J 37/244 (2013.01); G01N 23/2252 (2013.01); H01J 2237/2445 (2013.01); H01J 2237/24592 (2013.01);
Abstract
An inspection system that includes charged particle optics that irradiate a bottom of a hole with a charged particle beam propagated along an optical axis, an energy dispersive x-ray detector and a processor. The x-ray detector detects x-ray photons emitted from the bottom of the hole and generates detection signals indicative of the x-ray photons. The processor processes the detection signals to provide an estimate of the bottom of the hole.