The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 07, 2012
Filed:
Jun. 15, 2009
Carlos L. Ygartua, Palo Alto, CA (US);
Lei Zhong, Parker, TX (US);
John Mccormack, Linlithgow, GB;
Robert J. Mcclelland, San Ramon, CA (US);
Carlos L. Ygartua, Palo Alto, CA (US);
Lei Zhong, Parker, TX (US);
John McCormack, Linlithgow, GB;
Robert J. McClelland, San Ramon, CA (US);
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
A method and device for facilitating measurement of thermo-optically induced material phase change response in a thin planar or a grating film stack is disclosed. The method may include using small-spot visible and ultraviolet spectra (ellipsometric or reflectance) for measuring a material phase change response. The device may include a measurement system platform, at least one electrical resistor, at least one external electric probe, and ohmic contact circuitry.