Kouhei Sugihara

Title: Kouhei Sugihara: Innovator in Semiconductor Technology

Introduction

Kouhei Sugihara, based in Tokyo, Japan, is a distinguished inventor renowned for his contributions to semiconductor technology. With a remarkable portfolio of 14 patents, Sugihara has played a pivotal role in shaping advancements within the field, particularly in the design and manufacturing processes of nMOS transistors.

Latest Patents

Among his latest innovations, Sugihara has developed a semiconductor device that includes a gate electrode designed specifically for applying tensile stress to the silicon substrate. His work involves a method of manufacturing this device, where a gate insulating film and a gate electrode of non-single crystalline silicon are placed on a silicon substrate. The process employs the gate electrode as a mask to implant n-type dopants—like arsenic (As) or antimony (Sb) ions, which have a mass number of 70 or greater—creating a source/drain region of the nMOS transistor. This stage results in the amorphization of the gate electrode. Following this, a silicon oxide film is layered over the gate electrode at a temperature lower than its recrystallization point. The thermal processing conducted subsequently at around 1000° C. induces high compressive residual stress on the gate electrode, while applying high tensile stress to the channel region beneath it. As a result, the carrier mobility of the nMOS transistor is significantly enhanced.

Career Highlights

Sugihara has had an impressive career, with notable tenures at prominent companies such as Renesas Electronics Corporation and Renesas Technology Corporation. His innovative work has paved the way for significant advancements in the semiconductor industry, showcasing his ability to merge theoretical concepts with practical applications.

Collaborations

Throughout his career, Sugihara has collaborated with esteemed colleagues, including Hirokazu Sayama and Kazunobu Ohta. These partnerships have further enriched his work, leading to groundbreaking developments in semiconductor technology.

Conclusion

Kouhei Sugihara’s contributions to the world of semiconductor technology and his extensive patent portfolio are testament to his innovative spirit and dedication to advancing the field. As he continues to explore new frontiers in invention, his work remains a significant influence on the industry and inspires future developments.