Kimio Motoda

Title: Kimio Motoda - Pioneer in Substrate Processing Innovations

Introduction

Kimio Motoda is a distinguished inventor based in Kumamoto, Japan, known for his significant contributions to the field of substrate processing. With a remarkable portfolio of 21 patents, Motoda has continually pushed the boundaries of technology and innovation.

Latest Patents

Among his latest inventions, the substrate processing apparatus stands out for its intricate design. This apparatus features a holder equipped with an attraction surface designed to securely attract a substrate. It includes an outer attracting member that engages the peripheral portion of the substrate, alongside an inner attracting member that targets the inner section. Additionally, a moving device enables the adjustment of the outer member relative to the inner one, while a controller manages the distortion that might occur during the substrate's attraction.

Another notable patent from Motoda is the bonding apparatus and bonding method, which aims to minimize local deformation in bonded substrates. This innovative setup comprises a first holding unit that attracts and holds a substrate from above and a second holding unit for the substrate from below. A striker mechanism facilitates contact between the substrates, and a temperature control unit allows for local adjustments to ensure optimal bonding conditions.

Career Highlights

Motoda's professional journey includes pivotal roles in prominent companies such as Tokyo Electron Limited and Tokyo Electron Kyushu Limited. His experience in these organizations has significantly influenced his inventive output, ensuring he remains at the forefront of substrate processing technology.

Collaborations

Throughout his career, Motoda has collaborated with talented professionals including Kiyohisa Tateyama and Noriyuki Anai. These partnerships have fostered an environment of innovation, enabling the development of cutting-edge technologies in the substrate processing domain.

Conclusion

Kimio Motoda's dedication to innovation and his impressive array of patents highlight his status as a key figure in substrate processing technology. His work continues to have a lasting impact on the industry, paving the way for future advancements and discoveries.