The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 15, 2011
Filed:
Jul. 14, 2006
Tsuyoshi Yamasaki, Koshi, JP;
Toshifumi Inamasu, Koshi, JP;
Kenya Shinozaki, Koshi, JP;
Kimio Motoda, Koshi, JP;
Tsuyoshi Yamasaki, Koshi, JP;
Toshifumi Inamasu, Koshi, JP;
Kenya Shinozaki, Koshi, JP;
Kimio Motoda, Koshi, JP;
Tokyo Electron Limited, Tokyo-To, JP;
Abstract
The present invention provides a floating-type substrate conveying and processing apparatus that floats a substrate to be processed. The device includes a floating stage that floats the substrate, a liquid supplier placed above the floating stage via the substrate to supply a process liquid to a surface of the substrate, and a moving mechanism for holding the substrate as detachable at opposite ends of the substrate, at a floating height of the substrate, and for moving the substrate on the floating stage. The floating stage is formed of a porous member and has a plurality of suction apertures airtightly defined in a porous portion of the porous member. The floating stage injects gas through the porous portion and sucks gas through the suction apertures to float the substrate placed on the porous portion.