The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 04, 2002
Filed:
Oct. 12, 2000
Fumio Satou, Kumamoto-ken, JP;
Mitsuhiro Sakai, Kumamoto-ken, JP;
Takeshi Tsukamoto, Kumamoto, JP;
Yoichi Honda, Kumamoto, JP;
Kiyomitsu Yamaguchi, Kumamoto, JP;
Kimio Motoda, Kumamoto, JP;
Yoshitaka Matsuda, Kumamoto-ken, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
An apparatus for a treatment is provided, the apparatus comprising a vessel for recovering a treatment liquid flowing out or flying out when the object is treated, cleaning means for cleaning an inner wall surface of the vessel by supplying a cleaning liquid into the vessel, and a circulation system for recovering a discharged liquid discharged from the vessel when the inner wall surface of the vessel is cleaned by the cleaning means and supplying the recovered liquid to the cleaning means.