Yoichi Honda

Title: Yoichi Honda: Innovator in Cleaning Treatment Technologies

Introduction

Yoichi Honda is a notable inventor based in Kumamoto, Japan. He has made significant contributions to the field of cleaning treatment technologies, holding a total of 6 patents. His innovative methods have advanced the efficiency and effectiveness of cleaning processes in various applications.

Latest Patents

One of his latest patents is a "Method and apparatus for cleaning treatment." This method involves forming a coating film on a substrate within a cup and includes a step for dissolving part of the coating film using a cleaning liquid. The process also recovers used cleaning liquid, which is stored and monitored for levels. When the stored cleaning liquid falls below a predetermined level, fresh cleaning liquid is supplemented to ensure optimal cleaning performance.

Another significant patent is the "Substrate process method and substrate process apparatus." This invention allows for the drying of a resist solution coated on a substrate without heating. By blowing inert gas from a shower head onto the substrate, the resist solution dries effectively, preventing transfer marks that could lead to uneven film thickness and fluctuating circuit pattern line widths.

Career Highlights

Yoichi Honda is currently employed at Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His work focuses on developing innovative cleaning treatment technologies that enhance production processes.

Collaborations

Throughout his career, Yoichi has collaborated with notable colleagues, including Mitsuhiro Sakai and Kiyohisa Tateyama. These collaborations have contributed to the advancement of technologies in their respective fields.

Conclusion

In summary, Yoichi Honda is a distinguished inventor whose work in cleaning treatment technologies has led to several important patents. His innovative approaches continue to influence the industry and improve manufacturing processes.