Location History:
- Kumamoto, JP (1999 - 2001)
- Kumamoto-ken, JP (2002)
Company Filing History:
Years Active: 1999-2002
Title: Innovations of Yoshitaka Matsuda
Introduction
Yoshitaka Matsuda is a prominent inventor based in Kumamoto-ken, Japan. He has made significant contributions to the field of substrate treatment and cleaning methods, holding a total of six patents. His work is instrumental in enhancing the efficiency and yield of substrate processing.
Latest Patents
Matsuda's latest patents include a substrate treating method that involves heating a substrate coated with a resist solution at predetermined temperatures. This method prevents the occurrence of transfer, which indicates ununiformity in film thickness and changes in circuit pattern line width. Additionally, he has developed a method and apparatus for cleaning treatment, which features a vessel for recovering treatment liquid and a cleaning system that ensures the inner wall of the vessel is maintained effectively.
Career Highlights
Yoshitaka Matsuda is associated with Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His innovative approaches have contributed to advancements in substrate treatment technologies, making a notable impact in the field.
Collaborations
Matsuda has collaborated with notable coworkers such as Kiyomitsu Yamaguchi and Fumio Satou, further enhancing the scope and impact of his inventions.
Conclusion
Yoshitaka Matsuda's contributions to substrate treatment and cleaning methods exemplify the importance of innovation in technology. His patents reflect a commitment to improving processes within the semiconductor industry, showcasing his role as a key inventor in this field.