The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 31, 1999
Filed:
Dec. 18, 1997
Hiroshi Hashimoto, Kumamoto, JP;
Kiyohisa Tateyama, Kumamoto, JP;
Kiyomitsu Yamaguchi, Kumamoto, JP;
Yoshitaka Matsuda, Kumamoto, JP;
Norio Uchihira, Kumamoto-ken, JP;
Mitsuhiro Sakai, Kumamoto-ken, JP;
Fumio Satou, Kumamoto-ken, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
Disclosed is a processing apparatus comprising holding means, support means, process solution supply means, life means, and rotating means. A substrate to be processed is rotatably held by the holding means. An overhanging portion of the substrate extending over an edge of the holding means is supported by the support means to maintain a front surface of the substrate horizontally flat. A process solution is supplied from the process solution supply means onto the front surface of the substrate held by the holding means and supported by the support means. The substrate held by the holding means is vertically moved by the lift means relative to the support means. Further, the substrate moved upward relative to the support means is rotated by the rotating means.