Company Filing History:
Years Active: 2018-2023
Title: Kenji Yamada: Innovator in Resist Composition Technology
Introduction
Kenji Yamada is a prominent inventor based in Joetsu, Japan. He has made significant contributions to the field of resist composition technology, holding a total of seven patents. His work focuses on enhancing the performance and efficiency of resist materials used in photolithography.
Latest Patents
One of Kenji Yamada's latest patents is related to a resist composition and patterning process. This invention comprises a polymer compound with specific repeating units that change polarity when exposed to acid. The resist composition boasts high sensitivity, a wide depth of focus (DOF), and excellent resolution. It also reduces line edge roughness (LER), line width roughness (LWR), and critical dimension uniformity (CDU), ensuring good pattern shape after exposure and outstanding etching resistance.
Another notable patent involves a novel carboxylic acid iodonium salt and a resist composition that utilizes this salt as a quencher. This composition, when processed through photolithography using various laser technologies, results in improved resist patterns characterized by enhanced rectangularity, modulation transfer function (MEF), LWR, and CDU.
Career Highlights
Kenji Yamada is currently employed at Shin-Etsu Chemical Co., Ltd., where he continues to innovate in the field of resist materials. His work has been instrumental in advancing the capabilities of photolithography processes, which are critical in semiconductor manufacturing.
Collaborations
Kenji has collaborated with notable colleagues such as Satoshi Watanabe and Masaki Ohashi. Their combined expertise has contributed to the development of cutting-edge technologies in resist compositions.
Conclusion
Kenji Yamada's contributions to resist composition technology have significantly impacted the semiconductor industry. His innovative patents reflect his commitment to enhancing the performance of photolithography materials.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.