Location History:
- Kanagawa, JP (1992)
- Yokohama, JP (1987 - 1998)
- Hiratsuka, JP (2006 - 2013)
Company Filing History:
Years Active: 1987-2013
Title: The Innovations of Keiya Saito
Introduction
Keiya Saito is a prominent inventor based in Hiratsuka, Japan. He has made significant contributions to the field of optical inspection technologies, holding a total of 18 patents. His work focuses on advanced methods for inspecting patterned media, which are crucial in various technological applications.
Latest Patents
Among his latest patents is the "Scatterometry method and device for inspecting patterned medium." This invention specifies an inspection region using design information to perform region division for measurement through a scatterometry method. The detection data obtained is classified by pattern into periodic and non-periodic regions. An optical sensor detects a spectroscopic characteristic to extract features, which are then compared with features stored in a feature map database for evaluation of the patterned medium's state. Another notable patent is the "Pattern shape inspection method and apparatus thereof." This invention involves a two-step process for inspecting the shape of patterns. The first step includes irradiating wideband illuminating light, including far ultraviolet light, to a sample from a perpendicular direction. The second step involves irradiating a laser beam from an oblique direction to detect edge roughness based on scattered light.
Career Highlights
Keiya Saito has worked with notable companies such as Hitachi, Ltd. and Hitachi High-Technologies Corporation. His experience in these organizations has allowed him to develop and refine his innovative technologies.
Collaborations
Throughout his career, Saito has collaborated with esteemed colleagues, including Hiroshi Yamaguchi and Tateoki Miyauchi. These partnerships have contributed to the advancement of his research and inventions.
Conclusion
Keiya Saito's contributions to optical inspection technologies through his innovative patents have significantly impacted the field. His work continues to influence advancements in the industry, showcasing the importance of innovation in technology.
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