Location History:
- Kudamatsu, JP (2014 - 2020)
- Tokyo, JP (2018 - 2023)
Company Filing History:
9 out of 2,874 
5 out of 1,134 
Years Active: 2014-2023
Title: Kazunori Nakamoto: Innovator in Plasma Processing Technology
Introduction
Kazunori Nakamoto is a prominent inventor based in Kudamatsu, Japan. He has made significant contributions to the field of plasma processing technology, holding a total of 14 patents. His work focuses on improving the efficiency and effectiveness of plasma processing apparatuses.
Latest Patents
One of Nakamoto's latest patents is for an electrode cover for a plasma processing apparatus. This invention provides a technique capable of reducing variation in processing across the in-plane direction of a sample, thereby improving the yield of processing. The plasma processing apparatus includes a first electrode, a ring-shaped second electrode, and a dielectric ring-shaped member that covers the second electrode. Additionally, it features multiple power supply paths that deliver high-frequency power to both electrodes, along with a matching device on the power supply path to the second electrode. A resistor with a predetermined value connects the first position and the grounding position between the second electrode and the matching device.
Career Highlights
Throughout his career, Kazunori Nakamoto has worked with notable companies, including Hitachi High-Technologies Corporation and Hitachi High-Tech Corporation. His experience in these organizations has allowed him to develop and refine his innovative ideas in plasma processing technology.
Collaborations
Nakamoto has collaborated with several talented individuals in his field, including Kohei Sato and Takamasa Ichino. These collaborations have contributed to the advancement of technology in plasma processing.
Conclusion
Kazunori Nakamoto's contributions to plasma processing technology through his patents and collaborations highlight his role as an influential inventor. His work continues to impact the industry positively.