Location History:
- Kai, JP (2013 - 2016)
- Yamanashi, JP (2018)
- Nirasaki, JP (1998 - 2020)
Company Filing History:
20 out of 10,326 
2 out of 85 
Years Active: 1998-2020
Title: **Kazuki Denpoh: Innovator in Plasma Processing Technologies**
Introduction
Kazuki Denpoh, based in Nirasaki, Japan, is a notable inventor with an impressive portfolio of 20 patents. His work primarily focuses on plasma processing technologies, which are crucial in various industrial applications, particularly in the semiconductor manufacturing sector.
Latest Patents
Denpoh's latest patents include innovative designs for plasma processing apparatuses and methods. One significant patent describes a plasma processing apparatus featuring a processing chamber with a dielectric window and an RF antenna coil positioned outside the window. This apparatus is designed to support a target substrate while a processing gas is supplied to perform plasma processing. It efficiently generates plasma through inductive coupling, which is essential for advanced material processing. Another patent describes a similar apparatus but highlights a floating coil arrangement, which is coupled with the RF antenna through electromagnetic induction, further enhancing the efficiency of plasma generation.
Career Highlights
Denpoh has made substantial contributions to the field through his work with respected companies such as Tokyo Electron Limited and Tokyo Electron Kyushu Limited. His efforts in these organizations have led to remarkable advancements in plasma processing technology, significantly impacting the electronics manufacturing industry.
Collaborations
Throughout his career, Denpoh has collaborated with talented individuals, including Chishio Koshimizu and Yohei Yamazawa. These collaborations have allowed them to interchange ideas and work together to refine and develop new technologies that push the boundaries of what is possible in plasma processing.
Conclusion
Kazuki Denpoh stands out as a prominent inventor in the field of plasma processing, with a solid track record of patents and significant contributions to the industry. His innovative approaches continue to influence the way plasma technologies are applied, supporting the evolution of manufacturing processes that are crucial in today’s technology-driven world.