This inventor holds 17 USPTO granted patents. Top assignees: United Microelectronics Corp., Other. Active years: 2000-2004.
Location History:
- Kaohsiung City, TW (2001)
- Kaohsiung, TW (2000 - 2004)
Company Filing History:
16 out of 7,269 
1 out of 834,453 Years Active: 2000-2004
Title: Innovations of Juen-Kuen Lin
Introduction
Juen-Kuen Lin is a prominent inventor based in Kaohsiung, Taiwan. He has made significant contributions to the field of chemical mechanical polishing, holding a total of 17 patents. His innovative designs and systems have advanced the efficiency and effectiveness of polishing processes in various applications.
Latest Patents
One of his latest patents is a closed loop concentration control system for chemical mechanical polishing slurry. This system transports polishing slurry via piping into a closed loop control system. The polishing slurry first flows into an ultrasonic concentration detector, which determines the fluid velocity at that moment. This value is then converted into weight percent concentration using a memory data table. The converted data is transmitted to a program logic controller (PLC), which also receives data on the liquid level volume in the distribution tank. The PLC analyzes whether the quantity of oxidant is sufficient and controls an analog valve to transmit a supplementary quantity of oxidant if necessary.
Another notable patent is the design of a new carrier head for chemical mechanical polishing. This carrier head features a non-rigid incision ring that surrounds a support plate, replacing the conventional incision or rip found in traditional support plates. Additionally, it includes a flexible membrane extending around the edges of the support plate, maintaining a predetermined distance from the incision.
Career Highlights
Juen-Kuen Lin has worked with several companies, including United Microelectronics Corporation, where he has applied his expertise in developing innovative solutions for the semiconductor industry. His work has significantly impacted the efficiency of chemical mechanical polishing processes.
Collaborations
Throughout his career, Juen-Kuen Lin has collaborated with talented individuals such as Chien-Hsin Lai and Peng-Yih Peng. These collaborations have fostered innovation and contributed to the advancement of technology in their field.
Conclusion
Juen-Kuen Lin's contributions to the field of chemical mechanical polishing through his patents and collaborations highlight his role as a leading inventor. His innovative systems and designs continue to influence the industry and pave the way for future advancements.