Company Filing History:
Years Active: 2011-2013
Title: The Innovative Contributions of Ji Ae Park
Introduction
Ji Ae Park is a prominent inventor based in Santa Clara, CA (US). She has made significant contributions to the field of semiconductor technology, holding a total of 5 patents. Her work focuses on advanced materials and fabrication methods that enhance the performance and reliability of electronic devices.
Latest Patents
One of Ji Ae Park's latest patents is titled "Silicon nitride passivation layer for covering high aspect ratio features." This patent describes a method of forming a passivation layer comprising silicon nitride on features of a substrate. In the first stage of the deposition method, a dielectric deposition gas, which includes a silicon-containing gas and a nitrogen-containing gas, is introduced into the process zone and energized to deposit a silicon nitride layer. In the second stage, a treatment gas with a different composition is introduced into the process zone and energized to treat the silicon nitride layer. The first and second stages can be performed multiple times to achieve the desired results.
Another notable patent is "Fabrication of through-silicon vias on silicon wafers." This method includes etching a plurality of through holes in a silicon plate. An oxide liner is deposited on the surface of the silicon plate and on the sidewalls and bottom wall of the through holes. A metallic conductor is then deposited in the through holes. Additionally, a silicon nitride passivation layer may be deposited on the exposed back surface of the silicon plate of the substrate, which can be used concurrently with the oxide liner.
Career Highlights
Ji Ae Park is currently employed at Applied Materials, Inc., a leading company in the semiconductor industry. Her innovative work has contributed to the advancement of technologies that are critical for modern electronics.
Collaborations
Throughout her career, Ji Ae Park has collaborated with notable colleagues, including Nagarajan Rajagopalan and Bok Hoen Kim. These collaborations have further enhanced her research and development efforts in the field.
Conclusion
Ji Ae Park's contributions to semiconductor technology through her patents and work at Applied Materials, Inc. highlight her role as a leading inventor in the industry. Her innovative methods and dedication to advancing technology continue to impact the field significantly.