Company Filing History:
Years Active: 1998-2004
Title: **James F Vanell: Innovator in Chemical Mechanical Planarization**
Introduction
James F Vanell, an accomplished inventor based in Tempe, AZ, has made significant contributions to the field of chemical mechanical planarization (CMP). With a remarkable portfolio of 17 patents, his work has advanced the technology used in semiconductor manufacturing and polishing processes.
Latest Patents
Among his latest innovations, Vanell has developed the "Pad Conditioner Coupling and End Effector for a Chemical Mechanical Planarization System and Method Therefor." This patent outlines a pad conditioner coupling that securely holds an end effector for abrading a polishing media surface, essential for the planarization of the polishing media, removal of particulates, and enhancement of polishing slurry transportation. The design incorporates various components, such as shoulder screws, polymer bearings, a static plate, a wave spring, and a floating plate, enabling effective and precise operation.
Another significant patent is the "Wafer Carrier and Method of Material Removal from a Semiconductor Wafer." This invention features a wafer carrier adjustable to facilitate varying material removal rates from a semiconductor wafer without vacuum assistance. It comprises an elastically flexed wafer support structure that conforms to the semiconductor wafer, improving wafer planarity during the polishing process.
Career Highlights
James F Vanell has had a commendable career with notable companies including Motorola Corporation and Freescale Semiconductor, Inc. His extensive experience in semiconductor technologies has positioned him as a leading figure in the field of inventions related to CMP systems.
Collaborations
Throughout his career, Vanell has collaborated with several talented colleagues, including James A Grootegoed and Todd W Buley. Their partnerships have fostered innovative ideas and advancements in semiconductor processing technologies.
Conclusion
With his impressive array of patents and a strong professional background, James F Vanell continues to influence the semiconductor industry. His innovative spirit and dedication to improving CMP processes make him a noteworthy inventor in the field.