The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 04, 2003
Filed:
Jun. 02, 2000
James F. Vanell, Tempe, AZ (US);
Motorola, Inc., Schaumburg, IL (US);
Abstract
A pad conditioner coupling ( ) holds an end effector ( ) for abrading a polishing media surface. Pad conditioning planarizes the polishing media surface, removes particulates, and roughens the polishing media surface to promote the transport of polishing slurry. Pad conditioner coupling ( ) comprises shoulder screws ( ), polymer bearings ( ), a static plate ( ), a wave spring ( ), and a floating plate ( ). Wave spring ( ) is placed between static plate ( ) and floating plate ( ). The shoulder screws ( ) connect through the static plate ( ) and fasten to the floating plate ( ) to hold the wave spring ( ) in a preloaded condition. The polymer bearings ( ) prevent the shoulder screws ( ) from contacting the static plate ( ). Wave spring ( ) allows the floating plate ( ) to move in a non-parallel position to the static plate ( ) for angular compensation in the pad conditioning process.