James C Word

Title: The Innovative Mind of James C. Word

Introduction

James C. Word, a prominent inventor based in Portland, OR, has made significant contributions to the field of semiconductor technology, holding a remarkable total of 12 patents. His innovations have paved the way for advancements in pattern correction and resolution enhancement techniques, which are essential in the fabrication of integrated circuits.

Latest Patents

Among his latest patents, two notable inventions stand out. The first, titled **"Pattern correction in multiple patterning steps,"** discloses a sophisticated computing system to simulate a wafer image. This system utilizes a mandrel mask and a block mask to generate a final wafer image on a substrate. It cleverly estimates dummy sidewalls based on the mandrel mask and evaluates the contours of the block mask. By comparing the simulated wafer image against a target wafer image, the system identifies hotspots of deviation, enabling adjustments to be made for optical proximity corrections.

The second patent, **"Fragmentation point and simulation site adjustment for resolution enhancement techniques,"** outlines a method wherein a polygon representing a feature is fragmented into edge fragments. These fragments leverage simulation sites for image intensity calculations. The position and number of these sites can be modified based on the intensity results, allowing for precise OPC corrections. This inventive approach improves the overall resolution enhancement process by effectively adjusting the fragmentation based on calculated image intensity gradients.

Career Highlights

James C. Word has showcased his expertise through his tenure at notable companies, including Mentor Graphics Corporation. His significant patent portfolio reflects his dedication to pushing the boundaries of technology in the semiconductor industry.

Collaborations

Throughout his career, Word has collaborated with other distinguished professionals, including Nicolas Bailey Cobb and Patrick Joseph LaCour. These collaborations have likely enriched his innovative processes and propelled the development of his pioneering patents.

Conclusion

James C. Word exemplifies the spirit of innovation through his extensive patent portfolio and impactful contributions to semiconductor technology. His work continues to influence advancements in pattern correction and resolution enhancement techniques, solidifying his position as a noteworthy inventor in this dynamic field.