James A Smith

Title: Innovations and Contributions of James A. Smith

Introduction

James A. Smith is a notable inventor based in Los Altos, California. He holds a total of 11 patents, showcasing his significant contributions to the field of technology and innovation. His work primarily focuses on systems and methods for defect detection, which are crucial in various manufacturing processes.

Latest Patents

One of his latest patents is titled "Print Check Repeater Defect Detection." This invention provides systems and methods for detecting defects on a reticle. The system is designed to generate different stacked difference images for multiple instances of first patterned areas in different rows on a wafer. It performs double detection based on these images, identifying defects on the reticle effectively. This technology is particularly beneficial for high sensitivity repeater defect detection for extreme ultraviolet (EUV) reticles and multi-die reticles (MDR).

Another significant patent is the "System and Method for Inspection Using Tensor Decomposition and Singular Value Decomposition." This sample characterization system includes a controller that is communicatively coupled to an inspection sub-system. The system is capable of acquiring target image frames, generating a target tensor, and performing decomposition processes to identify differences between target and reference image frames. This innovation allows for a detailed characterization of samples based on identified differences.

Career Highlights

James A. Smith has worked with prominent companies in the technology sector, including KLA-Tencor Corporation and KLA Corporation. His experience in these organizations has contributed to his expertise in developing advanced inspection systems and methodologies.

Collaborations

Throughout his career, James has collaborated with talented individuals such as Richard Wallingford and Lu Chen. These partnerships have likely enhanced his innovative capabilities and contributed to the success of his projects.

Conclusion

James A. Smith's contributions to the field of technology through his patents and collaborations highlight his role as a significant inventor. His work in defect detection systems is paving the way for advancements in manufacturing processes.