Nirasaki, Japan

Isamu Inomata



Average Co-Inventor Count = 2.0

ph-index = 2

Forward Citations = 12(Granted Patents)


Location History:

  • Kitakoma-gun, JP (2002)
  • Nirasaki, JP (2010 - 2017)

Company Filing History:


Years Active: 2002-2017

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6 patents (USPTO):Explore Patents

Title: Isamu Inomata: Innovator in Semiconductor Inspection Technology

Introduction

Isamu Inomata is a prominent inventor based in Nirasaki, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of 6 patents. His work focuses on improving the efficiency and effectiveness of semiconductor device inspection.

Latest Patents

Among his latest innovations is a prober designed for inspecting semiconductor devices formed on a semiconductor wafer. This prober effectively suppresses a decrease in throughput during the inspection process. It features a stage with a horizontal mounting surface that securely holds the wafer, along with a probe card positioned to face the stage. The design includes three roller devices, each equipped with a vertical rotational shaft, which are evenly spaced along the circumference of the mounted wafer. These roller devices enable the wafer to rotate on a horizontal plane while maintaining contact with its peripheral edge.

Another notable patent is a probe apparatus that inspects the electrical characteristics of power devices with electrodes on both sides of a substrate at the wafer level. This apparatus reduces and uniformizes the contact resistance between the rear surface electrode of the substrate and the mounting surface conductor of the chuck top. The attracting device in this probe apparatus supports the semiconductor wafer and features numerous vertical fine holes arranged in a specific pattern, ensuring optimal performance.

Career Highlights

Isamu Inomata is associated with Tokyo Electron Limited, a leading company in the semiconductor industry. His work has significantly advanced the capabilities of semiconductor inspection technologies, contributing to the overall efficiency of the manufacturing process.

Collaborations

Inomata has collaborated with notable colleagues, including Kazuya Yano and Yasuhito Yamamoto. Their combined expertise has fostered innovation and development in semiconductor technologies.

Conclusion

Isamu Inomata's contributions to semiconductor inspection technology have established him as a key figure in the industry. His innovative patents continue to enhance the efficiency of semiconductor device inspection processes.

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