The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 20, 2017
Filed:
Feb. 11, 2015
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Assignee:
TOKYO ELECTRON LIMITED, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 1/073 (2006.01);
U.S. Cl.
CPC ...
G01R 1/07314 (2013.01); G01R 1/07364 (2013.01);
Abstract
A prober can suppress a decrease of a throughput in inspection of semiconductor devices on a substrate. The proberincludes a stagehaving a horizontal mounting surfacethat mounts thereon a wafer W on which semiconductor devices are formed; a probe cardprovided to face the stage; three roller devices, each having a vertical rotational shaft, equally-spaced along a circumference of the mounted wafer W. Each roller deviceis configured to rotate the wafer W on a horizontal plane while being in contact with a peripheral edge of the wafer W.