The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 30, 2010
Filed:
Jul. 28, 2005
Isamu Inomata, Nirasaki, JP;
Isamu Inomata, Nirasaki, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
An inspecting apparatus is provided for inspecting electrical characteristics of an object (W) to be inspected, such as a semiconductor wafer. The inspecting apparatus is provided with a placing table () for supporting the object, a lift mechanism () for bringing up and down the placing table, and a driving apparatus () for driving the lift mechanism. The apparatus is also provided with a probe (A) which makes contact with the object on the placing table brought up by the lift mechanism driven by the driving apparatus, and a load sensor (), including a compression-type piezoelectric element, for detecting a contact load between the object and the probe as an oscillation waveform.