The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 13, 2002
Filed:
Aug. 24, 2000
Isao Kono, Higashiyamanashi-gun, JP;
Isamu Inomata, Kitakoma-gun, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A probing method for inspecting electrical characteristics of an object by probes, including mounting the object on a main chuck having an X-axis, a Y-axis and a Z-axis which are driven by X-axis, Y-axis, and Z-axis driving mechanisms, moving the main chuck in X-, Y-, and Z-directions by driving the X-axis, Y-axis and Z-axis by the X-axis, Y-axis, and Z-axis driving mechanisms such that each of electrode pads of the object mounted on the main chuck is brought into contact with each of probes of a probe card above the main chuck, and overdriving the main chuck by simultaneously and collectively controlling the X-axis, Y-axis, and Z-axis driving mechanisms such that the X-axis, Y-axis, and Z-axis driving mechanisms simultaneously overdrive the main chuck to keep a tip portion of each of the probes within a surface area of the electrode pad of the object.