The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 16, 2016
Filed:
Jul. 28, 2014
Tokyo Electron Limited, Tokyo, JP;
Eiichi Shinohara, Nirasaki, JP;
Munetoshi Nagasaka, Nirasaki, JP;
Isamu Inomata, Nirasaki, JP;
Kazuya Yano, Nirasaki, JP;
Yoshiyasu Kato, Nirasaki, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A probe apparatus of inspecting electrical characteristics of a power device having electrodes on both sides of a substrate at wafer level can reduce and uniformize a contact resistance between the electrode on a rear surface of the substrate and a mounting surface conductor of a chuck top. In the probe apparatus, an attracting device supports a semiconductor wafer W on the chuck topand has many vertical fine holes in a pattern (diameter φ and pitch p) that satisfies the condition of φ<p≦2φ. For example, the diameter φ is about 0.25 mm, and the pitch p is about 0.5 mm.