Company Filing History:
Years Active: 2017-2023
Title: In-Tsang Lin: Innovator in Chemical Mechanical Polishing Technology
Introduction
In-Tsang Lin is a prominent inventor based in Kaohsiung, Taiwan. He has made significant contributions to the field of semiconductor manufacturing, particularly in the area of chemical mechanical polishing (CMP). With a total of 7 patents to his name, Lin's innovations have advanced the efficiency and effectiveness of wafer processing.
Latest Patents
One of Lin's latest patents is titled "System and method for monitoring chemical mechanical polishing." This invention includes an apparatus designed for the chemical mechanical polishing of wafers, featuring a process chamber, a rotatable platen, and a polishing pad. The apparatus is equipped with a slurry supply port and a process controller that manages its operation. Additionally, a set of microphones within the process chamber detects sound during operation, allowing for real-time monitoring and feedback to enhance the polishing process.
Another notable patent is the "Inspection and cleaning system and method for the same." This system comprises an inspection device and an image processing unit that scans wafers to generate inspected images. Utilizing deep learning algorithms, the image processing unit analyzes these images to identify defects. If defects are detected, the inspection device magnifies the region of interest for further examination.
Career Highlights
In-Tsang Lin is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work focuses on developing innovative solutions that improve wafer processing techniques, contributing to the company's reputation for excellence in manufacturing.
Collaborations
Lin collaborates with talented colleagues, including Wei-Ting Chen and Vincent Chen, who contribute to the development of cutting-edge technologies in the semiconductor field.
Conclusion
In-Tsang Lin's contributions to chemical mechanical polishing technology exemplify his commitment to innovation in the semiconductor industry. His patents reflect a deep understanding of the complexities involved in wafer processing, making him a valuable asset to Taiwan Semiconductor Manufacturing Company Limited.