Hsinchu, Taiwan

Hsu-Sheng Yu


Average Co-Inventor Count = 1.8

ph-index = 3

Forward Citations = 38(Granted Patents)


Location History:

  • Chi-Lung, TW (2003)
  • Hsinchu, TW (2003 - 2016)
  • Hsinchu County, TW (2016)

Company Filing History:


Years Active: 2003-2016

where 'Filed Patents' based on already Granted Patents

9 patents (USPTO):

Title: Hsu-Sheng Yu: Innovator in Semiconductor Technology

Introduction

Hsu-Sheng Yu is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 9 patents. His work focuses on improving semiconductor devices and manufacturing methods, showcasing his expertise and innovative spirit.

Latest Patents

Hsu-Sheng Yu's latest patents include a semiconductor device and a method of manufacturing the same. This semiconductor device features a substrate and a dielectric layer, which is positioned on the substrate. The dielectric layer contains multiple openings, with the side walls of these openings exhibiting a concave-and-convex profile. Another notable patent is a method of controlling contact hole profile for metal fill-in. This method addresses the issue of overhang in a contact hole formed in a contact film stack. It involves overlaying a liner layer on the contact film stack, which also coats the contact hole. By removing a portion of the liner to expose the overhang, the exposed overhang can be eliminated. The liner is then utilized to fill in a bowing profile of the contact hole, ensuring that the sidewalls are smooth and straight, which is essential for metal fill-in while minimizing piping defects.

Career Highlights

Throughout his career, Hsu-Sheng Yu has worked with notable companies, including Macronix International Co., Ltd. His experience in the semiconductor industry has allowed him to develop innovative solutions that enhance device performance and manufacturing efficiency.

Collaborations

Hsu-Sheng Yu has collaborated with esteemed colleagues such as Hong-Ji Lee and Chun-Hung Lee. These partnerships have contributed to the advancement of semiconductor technologies and the successful development of his patents.

Conclusion

Hsu-Sheng Yu's contributions to semiconductor technology through his patents and collaborations highlight his role as an influential inventor in the field. His innovative methods and devices continue to shape the future of semiconductor manufacturing.

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