Company Filing History:
Years Active: 2004-2006
Title: **Hsin-Cheng Liu: Innovator in Semiconductor Equipment Technology**
Introduction
Hsin-Cheng Liu is a prominent inventor based in Hsinchu, Taiwan, renowned for his contributions to the field of semiconductor technology. With a notable portfolio of three patents, Liu has played a significant role in advancing innovations that enhance the efficiency and effectiveness of semiconductor manufacturing processes.
Latest Patents
Among Liu's latest patents is the invention of a **Gas Conduit for a Load Lock Chamber**. This innovation involves a gas conduit designed to connect to a gas source for introducing gas into the load lock chamber of semiconductor equipment. The invention features a filter mounted on the top surface of the load lock chamber, a pressure limitative device to maintain a preset pressure from the gas source, and a gas inlet device that facilitates gas introduction with maximum flow rate when breaching the vacuum within the chamber.
Another crucial patent is the **Method of Removing HDP Oxide Deposition**. This method details a systematic approach to etch HDP oxide deposition using both inside-out and outside-in models, where different etching rates are employed at the center and edges of the substrate. It culminates in the removal of the remaining silicon oxide layer via chemical-mechanical polishing, resulting in a more uniform planarization of the HDP oxide deposition.
Career Highlights
Hsin-Cheng Liu is associated with Macronix International Co., Ltd., a leader in semiconductor solutions, where his expertise has been pivotal in developing cutting-edge technologies. His innovative work not only contributes to the success of his organization but also significantly impacts the broader semiconductor industry.
Collaborations
Throughout his career, Liu has collaborated with notable colleagues, including Chih-Ping Chen and Shao-Chung Hsu. These partnerships exemplify the collaborative spirit prevalent in the research and development environment that fosters innovation in technology.
Conclusion
Hsin-Cheng Liu's inventions are a testament to his expertise and dedication in the semiconductor field. His patents not only showcase innovative solutions to challenging problems but also highlight his contributions to enhancing manufacturing processes within the industry. As semiconductor technology continues to evolve, Liu's work will undoubtedly remain influential in shaping its future.